TT-1 Industrial Turn-Table Plasma System
The TT-1 is a surface modification system that has a rotating electrode designed to meet the needs of the wire bonding industry. It’s based off of our popular BT-1 plasma processing system sharing the same robust and reliable characteristics. It has the capacity to evenly process multiple slotted lead frame magazines and is able to process both perforated and non-perforated magazines. The rotating active processing surface has the option of insulated or direct-on method of plasma treatment.
To purchase a TT-1, please contact us at (775) 883-1336 or email us at sales@plasmaetch.com.
Standard Features
Electrode ConfigurationRotating 17” Diameter Work Table
Generator600W 13.56MHz Power Supply with Automatic Matching Network
Gas ControlOne 0-500cc Mass Flow Controller
Control SystemColor PLC-based Touch Screen Control Interface, Multiple Recipe Storage
Vacuum Gauge1-2000 mT
Vacuum Pump29CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
355CFM Blower
3 Micron Oil Filtration System
Chamber Material6061-T6 Aluminum
Chamber Dimensions26 1⁄2”x23 3⁄4”x21”
Unit Dimensions70"x36”x32”
Unit Weight1200lbs
Vacuum Pump Weight150lbs
Made in the U.S.A.Optional Features
Most systems can be customized with a wide range of options including:
Larger MHz Power SuppliesHigher watt/frequency power supplies
PC-based Control SystemFor fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.
Electrostatic ShieldingGreatly increases process uniformity by eliminating excess etching at the outer bounds of the processed material
Temperature Control SystemTo maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needs
Dry and Oil-Driven Vacuum Pumps and Blower BoostersA variety of vacuum pump options for more control over the process chamber pressure
Chiller System for Dry Vacuum PumpNecessary for the operation of a dry vacuum pump
Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas GeneratorTo ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
Vacuum Pump Oil Mist EliminatorCaptures oil from vacuum pump exhaust
Vacuum Pump Oil FiltrationFilters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pump
Automatic Vacuum ControlProvides automation of the process chamber pressure
Additional Digital Mass Flow ControllersProvides digital automation and monitoring of process gases
Gas Steering MatrixDesigned to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controls
Low Gas-Source AlarmNotification for when your process gas container needs replenished
Light TowerFor easy visualization of the steps of the plasma processing sequence
Fume ScrubberTo eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust
Facility Requirements
Electrical120/208 VAC, 50/60 Hz @ 50 Amps
Compressed Air Service80-100PSI, 0.5CFM
Regulated Process Gases15PSI
