PE-75 XL
The PE-75 XL is our largest entry level plasma treatment system. It's a feature packed, low cost, and robust machine that is perfect for production facilities, research labs, universities, medical facilities, or any industry which needs a small-scale, cost-effective plasma ashing solution. It has all the features of the PE-75 but also features a larger chamber size for larger processing applications.
To purchase a PE-75 XL, please contact us at (775) 883-1336 or email us at sales@plasmaetch.com.
Standard Features
Electrode ConfigurationOne or Two Horizontal (9"Wx15"D)
Generator400W 50KHz Continuously Variable Power Supply
Gas ControlTwo 0-50cc/min Rotometers with Precision Needle Valves
Control SystemPLC-Based Keypad Input System with Alphanumeric Display; Stores One Recipe for Automatic Process Sequencing
Vacuum Gauge1-2000 mT
Vacuum Pump5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)
Chamber Material6061-T6 Aluminum
Chamber Dimensions15.75” Deep x 10” Round
Unit Dimensions18"x19"x24"
Unit Weight90lbs
Vacuum Pump Weight35lbs
Made in the U.S.A.Note: High frequency units may have larger external dimensions, so check with your sales rep if your space is limited.
Optional Features
MHz Power Supplies with Automatic Matching NetworkHigher watt/frequency power supplies
PC-based Control SystemFor fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.
Dry Vacuum PumpFor more control over the process chamber pressure
Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas GeneratorTo ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
Additional Gas Inputs/RotometersAllows for more complex process gas combinations
Digital Mass Flow ControllersProvides digital automation and monitoring of process gases
Light TowerFor easy visualization of the steps of the plasma processing sequence
Facility Requirements
Electrical120VAC / 60Hz @ 15A or 220VAC / 50Hz @ 14A
