PE-75 Plasma Asher

PE-75 XL

The PE-75 XL is our largest entry level plasma treatment system. It's a feature packed, low cost, and robust machine that is perfect for production facilities, research labs, universities, medical facilities, or any industry which needs a small-scale, cost-effective plasma ashing solution. It has all the features of the PE-75 but also features a larger chamber size for larger processing applications.

This unit excels at plasma cleaning and surface modification as well as use as a plasma asher.

To purchase a PE-75 XL, please contact us at (775) 883-1336 or email us at

Standard Features

Electrode Configuration

One or Two Horizontal (9"Wx15"D)


400W 50KHz Continuously Variable Power Supply

Gas Control

Two 0-50cc/min Rotometers with Precision Needle Valves

Control System

PLC-Based Keypad Input System with Alphanumeric Display; Stores One Recipe for Automatic Process Sequencing

Vacuum Gauge

1-2000 mT

Vacuum Pump

5CFM 2-Stage Direct Drive Oil Pump (Oxygen Service – Krytox Charged)

Chamber Material

6061-T6 Aluminum

Chamber Dimensions

15.75” Deep x 10” Round

Unit Dimensions


Unit Weight


Vacuum Pump Weight


Made in the U.S.A.

Note: High frequency units may have larger external dimensions, so check with your sales rep if your space is limited.

Optional Features

MHz Power Supplies with Automatic Matching Network

Higher watt/frequency power supplies

PC-based Control System

For fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms, etc.

Dry Vacuum Pump

For more control over the process chamber pressure

Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas Generator

To ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity

Additional Gas Inputs/Rotometers

Allows for more complex process gas combinations

Digital Mass Flow Controllers

Provides digital automation and monitoring of process gases

Light Tower

For easy visualization of the steps of the plasma processing sequence

Facility Requirements


120VAC / 60Hz @ 15A or 220VAC / 50Hz @ 14A