PE-5000 Large Scale Plasma Treatment System
The PE-5000 is a large plasma treatment system ideal for cleaning and activating large or bulky parts. The removable, adjustable height shelves hold up to 100lbs each.
All PE-5000 systems include Plasma Etch's easy to use PC control system. A graphical user interface displays the status of the system at all times while allowing unlimited recipe storage, historical logging with a calendar feature, and more.
Available with front and back doors to allow inline treatment, this system was designed to plasma clean and activate nearly any size product.
The PE-5000 is an excellent choice for clean room settings.
To purchase a PE-5000, please contact us at (775) 883-1336 or email us at sales@plasmaetch.com.
Standard Features
Electrode ConfigurationVertical electrode design
GeneratorFully adjustable and removable shelves. 100 lbs per shelf load rating
Generator5000 Watt RF Generator - 40 KHz
Gas ControlTwo 0-5000cc Mass Flow Controllers with Low Gas Source Alarm
Control SystemPC-based Control System for fully automatic system control, multi-step process sequencing, multiple recipe storage, data logging/trending, events/alarms with calendar
Vacuum Pump2600 CFM Pump and Blower
Vacuum Gauge1-2000 mT
Chamber Material6061-T6 Aluminum
Unit Dimensions90" Tall x 89" Wide x 63" Deep
Made in the U.S.A.Optional Features
Most systems can be customized with a wide range of options including:
Custom Sized Vacuum Chamber, Number/Size of ElectrodesTo ensure your system is able to specifically meet your throughput requirements
Temperature Control SystemTo maintain specific temperatures in the processing chamber for enhanced uniformity and application-specific needs
Dry and Oil-Driven Vacuum Pumps and Blower BoostersA variety of vacuum pump options for more control over the process chamber pressure
Chiller System for Dry Vacuum PumpNecessary for the operation of a dry vacuum pump
Chamber and Vacuum Pump Purge Systems / Air Dryer / Purge Gas GeneratorTo ensure thorough removal of contaminants from operating equipment, providing uniformity and increasing longevity
Vacuum Pump Oil Mist EliminatorCaptures oil from vacuum pump exhaust
Vacuum Pump Oil FiltrationFilters the vacuum pump oil down to a 3 micron level which increases the longevity of the oil and the vacuum pump
Automatic Vacuum ControlProvides automation of the process chamber pressure
Additional Digital Mass Flow ControllersProvides digital automation and monitoring of process gases
Software Configurable Gas Steering MatrixDesigned to allow for up to 5 process gas inputs; 3 are selectable at any time by software driven controls
Low Gas-Source AlarmNotification for when your process gas container needs replenished
Light TowerFor easy visualization of the steps of the plasma processing sequence
Fume ScrubberTo eliminate hazardous fumes/contaminants from the chamber/vacuum pump exhaust
Facility Requirements
Electrical120/208 VAC, 50/60 Hz @ 50-100Amps, 3 Phase, 5 Wire
Compressed Air Service80-100PSI, 1 CFM
Regulated Process Gases15-30PSI
Closed Loop Chilled Water SourceCooling Water Source for RF Generator @ 2GPM
